Industrial Equipment
Dosing accuracy +/- 2%
Perfect Drying
Fast & Stable transport unit
Photovoltaic
Batch XL
Optimized system for high efficiency solar cell (n-type)
Ultra capacity batch equipment (highest cost performance)
Features & Benefits
Various batch application
- Alkaline / Acidic texturing
- pSC1 / SC2 / O3 cleaning
- Oxidation
High throughput
- 600 wafers load
- up to 12,000 w/h
210
Capable Si wafer size
Up to M12 (210 x 210mm)
High dosing accuracy
+/- 2%
Perfect Drying
Non metal component
wet process
Blower
Spray
Inline XL
Optimized system for n-type inline application
Features & Benefits
Various cleaning solutions
- Roller brush / Disc brush
- Bubble jet
- Ultrasonic / Plasma
Particle free design
210
Capable Si wafer size
up to M12 (210 x 210mm)
Perfect Drying
Various inline application
- HF/Metal Cleaning
- RCA & O3 Cleaning
- Developing / Etching / Striping
- Electrical deposition
Glass (Thin film, FPD)
SEAline Glass Cleaner
Aim to zero particle
Features & Benefits
Various inline application
- RCA & O3 Cleaning
- Developing / Etching
/ Striping
Various cleaning solutions
- Roller brush / Disc brush
- Bubble jet
- Ultrasonic / Plasma
Capable glass size
Generation 7
Particle free design
Perfect Drying
Inline wet process
Easy maintenance
High pressure spray cleaning
Semiconductor
SEAbatch SEMI
Ultra capacity batch equipment (highest cost performance)
Features & Benefits
Various batch application
- RCA / SPM / HFO3 / DIO3 cleaning
- Developing / Etchiong / Stripping
- Oxidation / Special drying
Particle perfomance
- RCA cleaning < 30EA
- Dry < 30EA
Available for substrate
- Si wafer up to 300mm
- Glass / Ceramics up to 500x500mm
Perfect Drying
High dosing accuracy +/- 2ml
Non metal component
Smart factory
Ready for the industrie 4.0
Smart AGV
Benefits
- Automate factory logistics & optimize workflows
- Autonomous / safe / scalable / efficient / agile
SR7P
SR7C
SR9
MotorSense
Benefits
- AI powered motor failure prediction
- Precise predictive notifications of equipment abnormality
to avoid unexpected breakdowns
- Real-time monitoring service
* anytime, anywhere access to Web & Mobile
