Industrial Equipment

SEAbatch PV
Dosing bottle
Dosing bottle

Dosing accuracy +/- 2%

Hot Water Dry
Hot Water Dry

Perfect Drying

Transport unit
Transport unit

Fast & Stable transport unit

Photovoltaic

Batch XL

Optimized system for high efficiency solar cell (n-type)
Ultra capacity batch equipment
(highest cost performance)

Features & Benefits

Various batch application

  - Alkaline / Acidic texturing
  - pSC1 / SC2 / O3 cleaning
  - Oxidation

High throughput

  - 600 wafers load 
  - up to 12,000 w/h

210

Capable Si wafer size

Up to M12 (210 x 210mm)

High dosing accuracy

+/- 2%

Perfect Drying

Non metal component

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wet process
wet process

wet process

Blower
Blower

Blower

Spray
Spray

Spray

Inline XL

Optimized system for n-type inline application

Features & Benefits

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Various cleaning solutions

  - Roller brush / Disc brush 
  - Bubble jet
  - Ultrasonic / Plasma

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Particle free design

210

Capable Si wafer size

up to M12 (210 x 210mm)

Perfect Drying

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Various inline application

  - HF/Metal Cleaning
  - RCA & O3 Cleaning
  - Developing / Etching / Striping
  - Electrical deposition

 

Glass (Thin film, FPD)

SEAline Glass Cleaner

Aim to zero particle

Features & Benefits

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Various inline application

  - RCA & O3 Cleaning
  - Developing / Etching

     / Striping

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Various cleaning solutions

  - Roller brush / Disc brush
  - Bubble jet
  - Ultrasonic / Plasma

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Capable glass size

Generation 7

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Particle free design

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Perfect Drying

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Bubblejet_1

Inline wet process

Roller brush_1
Roller brush_1

Easy maintenance

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Transport_1

High pressure spray cleaning

Semiconductor

SEAbatch SEMI

Ultra capacity batch equipment (highest cost performance)

Features & Benefits

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Various batch application

  - RCA / SPM / HFO3 / DIO3 cleaning
  - Developing / Etchiong / Stripping
  - Oxidation / Special drying

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Particle perfomance

  - RCA cleaning < 30EA
  - Dry < 30EA

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Available for substrate

  - Si wafer up to 300mm

  - Glass / Ceramics up to 500x500mm

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Perfect Drying

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High dosing accuracy +/- 2ml

Non metal component

Smart factory

Ready for the industrie 4.0

Smart AGV

Benefits

  - Automate factory logistics & optimize workflows
  - Autonomous / safe / scalable / efficient / agile

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SR7P

SR7C

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SR9

MotorSense

Benefits

  - AI powered motor failure prediction
  - Precise predictive notifications of equipment abnormality

     to avoid unexpected breakdowns
  - Real-time monitoring service
    * anytime, anywhere access to Web & Mobile

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