Industrial Equipment
Photovoltaic
SEAbatch 600
Optimized system for high efficiency solar cell (n-type)
Ultra capacity batch equipment (highest cost performacne)
Features & Benefits
Variouse batch application
- Alkaline / Acidic texturing
- pSC1 / SC2 / O3 cleaning
- Oxidation
High throughput
- 600 wafers load
- up to 12,000w/h
166
Capable Si wafer size
up to 166mm x 166 mm
(M6 wafer size)
High dosing accuracy
+/- 2%
Perfect Drying
Non metal component
Glass (Thin film, FPD )
SEAline Glass Cleaner
Aim to zero particle
Features & Benefits
Variouse inline application
- RCA & O3 Cleaning
- Developing / Etching
/ Striping
Various cleaning solutions
- Roller brush / Disc brush
- Bubble jet
- Ultrasonic / Plasma
Capable glass size
Generation 7
Particle free design
Perfect Drying
Semiconductor
SEAbatch SEMI
Ultra capacity batch equipment (highest cost performace)
Features & Benefits
Variouse batch application
- RCA / SPM / HFO3 / DIO3 cleaning
- Developing / Etchiong / Stripping
- Oxidation / Special drying
Particle perfomance
- RCA cleaning < 30EA
- Dry < 30EA
Available for substrate
- Si wafer up to 300mm
- Glass / Ceramics up to 500x500mm
Perfect Drying
High dosing accuracy +/- 2ml
Non metal component
Smart factory
Ready for the industrie 4.0
Scorpion Series
Autonomous Mobile Robot
Benefits
- Flexible & efficient work
- Low CoO & high profit
D series
C series
A series
MotorSense
Motor Failure Prediction System
Benefits
- AI Powered
- Convenience & Compatibility
- Human / Machine Ensemble
